Probe and electrical part/circuit inspecting apparatus as well as electrical part/circuit inspecting method

作者: You Kondoh , Toshiaki Ueno

DOI:

关键词:

摘要: An apparatus and method for providing durable, high performance, probing of semiconductor devices having a large number narrow pitch terminals. A single probe the present invention provides flexible wide range various sizes terminal arrangements. In contrast, teachings prior art require separate to be manufactured or re-formed each different size arrangement devices. The includes electrodes electrically coupled with test system in such way so as provide probed selection more than two arrangements which device terminals contacting are not shorted other by probe.

参考文章(6)
Harvey C. Tingley, Multi-component test fixture ,(1989)
Burkhard Lischke, Reinhold Schmitt, Jurgen Frosien, Arrangement for testing micro interconnections and a method for operating the same ,(1983)
B. Leslie, F. Matta, Membrane probe card technology (the future for higher performance wafer test) international test conference. pp. 601- 607 ,(1988) , 10.1109/TEST.1988.207842
J. Kister, R.L. Franch, Advances In Membrane Probe Technology international test conference. pp. 927- 935 ,(1992) , 10.1109/TEST.1992.527919