Method of monitoring atmospheric pressure glow discharge plasma

作者: Satiko Okazaki , Masuhiro Ogoma

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摘要: The generation of glow plasma due to discharge at an atmospheric pressure and its stabilization are monitored by counting the number current pulses. Alternatively, they change a retention voltage and/or full value besides pulses, or Lissajous figures, detect state stabilize control plasma. These procedures make it possible monitor accurately, rapidly readily,

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