Automation for rotary sorters
作者： Asaf Schlezinger , Markus J. Stopper
DOI:
关键词:
摘要: In one example, a sorting unit includes system and plurality of bins into which substrates are sorted. The bin handler having first end effector for receiving the bins, second disposing an empty in previous location received bin. method operating is also provided.
lens.org 参考文章(20)
Yoshinari Wada, Ceiling transport vehicle ,(2010)
Dean C. Hruzek, Michael Robert Rice, Amitabh Puri, Jeffrey C. Hudgens, Nir Merry, Peter Irwin, Steve Szudarski, Andrew Scott Cornelius, Eric A. Englhardt, Robert Irwin Decottignies, Steven V. Sansoni, Linked vacuum processing tools and methods of using the same ,(2013)
Mitsuru Yoshida, Yoshitaka Inui, Article transport facility ,(2010)
Michael Krolak, Richard H. Gould, Anthony C. Bonora, Integrated systems for interfacing with substrate container storage systems ,(2010)
Won Geyung Kim, Hyun Suk Jang, Semiconductor material handling system ,(2007)
Peter van der Meulen, Stacked process modules for a semiconductor handling system ,(2011)
Douglas E. Olson, Robert L. Stone, Gary P. Burns, Delivery point sequencing mail sorting system with flat mail capability ,(2002)
Teruo Asakawa, Hiroaki Saeki, Multi-chamber treatment system ,(1997)
Kensaku Onishi, Jun Yamamoto, Yukihiko Inagaki, Substrate processing apparatus, storage device, and method of transporting substrate storing container ,(2011)
Wayne J. Schmidt, Kyle Hanson, Mark Dix, Daniel J. Woodruff, Kevin W. Coyle, Semiconductor processing apparatus having linear conveyer system ,(1997)