Linked vacuum processing tools and methods of using the same
作者： Dean C. Hruzek , Michael Robert Rice , Amitabh Puri , Jeffrey C. Hudgens , Nir Merry
DOI:
关键词:
摘要: In some embodiments, a linked processing tool system is provided that includes (1) first having at least transfer chamber configured to couple plurality of chambers; (2) second (3) third coupled between the and tools substrates tools; (4) single sequencer controls substrate operations tool, system. Numerous other aspects are provided.
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