Fabrication system and method having inter-apparatus transporter
作者： Kenichi Mizuishi , Fumihiko Uchida , Yoshifumi Kawamoto , Natsuki Yokoyama , Yoshio Kawamura
DOI:
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摘要: Disclosed is a fabricating system including plurality of processing apparatuses connected to each other by means an inter-apparatus transporter, wherein one group semiconductor wafers are processed in and transported specified for time interval from (To+T) To; another the remaining (To+2T). Since can receive at least works transporter T min, distribution completed min. The emptied unloaded which makes easy scheduling, control management transporting system. Moreover, since periodically controlled cycle scheduling be made easy, enhance level optimization, thus improving productivity.
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