Mapping of Si/SiC p-n heterojunctions using scanning internal photoemission microscopy

作者: Masato Shingo , Jianbo Liang , Naoteru Shigekawa , Manabu Arai , Kenji Shiojima

DOI: 10.7567/JJAP.55.04ER15

关键词:

摘要: … We demonstrated the two-dimensional characterization of p + -Si/n − -SiC heterointerfaces by scanning internal photoemission microscopy (SIPM). In internal photoemission spectra, a …

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