Using Raman Microscopy to Detect Leaks in Micromechanical Silicon Structures
作者： W. H. Weber , M. Zanini-Fisher , M. J. Pelletier
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摘要: We demonstrate the use of Raman microscopy for leak detection in hermetically sealed micromachined accelerometers. Leaks were indicated by presence a foreign gas, this case oxygen, 70- mu m-deep cavity enclosing accelerometer between silicon cap and Pyrex window. Confocal, nondiffraction-limited operation microscope utilized available pathlength sample while still rejecting most fluorescence from . peak intensities accurately determined noise fitting spectra to function that modeled unresolved Q-branch line shapes oxygen nitrogen.
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