Method for fabricating surface emitting laser
作者： Yukihiro Tsuji
DOI:
关键词:
摘要: A method for fabricating a surface emitting laser includes the steps of: preparing processing apparatus with first part and second part, including heater that heat respectively; wafer product forming laser, semiconductor post III-V compound layer containing aluminum as constituent element, being exposed at side face of post; after disposing in energizing heater; supplying gas no oxidizing agent to apparatus; stopping gas, by an apparatus.
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