作者: D. Leisen , R. Rusanov , F. Rohlfing , T. Fuchs , C. Eberl
DOI: 10.1063/1.4919765
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摘要: A novel high-temperature micro-tensile setup allows the characterization of elastic and plastic as well creep behavior free-standing thin films at temperatures up to 1000 °C. Correspondingly, a new layout for film tensile test structures has been developed, enabling accurate self-alignment upon loading. Furthermore, differential optical strain measurement technique optimizations path implemented, providing resolution below 1 × 10−4 Two different polycrystalline SiC have investigated in tension acquire stress-strain data corresponding Young’s modulus The high sensitivity makes it also possible identify strains regime.