Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices
作者： J. Dunning , Xiao An Fu , Srihari Rajgopal , Mehran Mehregany , Christian A. Zorman
DOI: 10.4028/WWW.SCIENTIFIC.NET/MSF.457-460.1523
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cheric.org参考文章(4)
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