Influence of CuSn thickness on the work function and optoelectrical properties of ZnO/CuSn/ZnO multilayer films
作者： Daeil Kim
DOI: 10.1016/J.DISPLA.2010.05.002
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摘要: Abstract Transparent and conductive ZnO/CuSn/ZnO (ZCSZ) multilayer films were deposited on glass substrates by magnetron sputtering without intentional substrate heating. The thicknesses of CuSn layer was varied from 5 to 20 nm. In the XRD patterns, ZCSZ with a 5 nm thick had ZnO (0 0 2) peak, while 20 nm intermediate (6 6 0) peaks. As thickness increased, sheet resistance decreased 44 16 Ω/□ optical transmittance deteriorated due increased absorption. interlayer best figure merit 4.5 × 10 −3 Ω −1 . work function 4.55 eV. These results indicate that film is an alternative candidate for use as transparent electrode in OLEDs various displays.
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