A structure study of the electroless deposition of Au on Si():H

摘要: Abstract Electroless deposition of gold in monolayer amounts on hydrogen terminated Si(1 1 1) was studied by a variety structure sensitive techniques. Rutherford back scattering data revealed linear relationship between the Au coverage and concentration solution used for deposition. Atomic force microscopy surface X-ray diffraction studies indicated cluster formation, with Au(1 1 1) face epitaxially aligned to Si(1 1 1):H substrate. However, standing wave experiments at below one suggested formation layer. Both clusters isolated atoms appear be present all coverages, which is explained type `wetting layer', addition increases as increases.