Characterization of the Initial Growth Stages of Electroless Ag(W) Films Deposited on Si(100)
作者： A. Inberg , L. Zhu , G. Hirschberg , A. Gladkikh , N. Croitoru
DOI: 10.1149/1.1415549
关键词:
摘要: Scanning tunneling microscopy (STM). high resolution scanning electron microscopy, and transmission (TEM) have been used to study the film evolution at initial stage of deposition structure electrolessly deposited silver films that contain tungsten [Ag(W)] on single crystal silicon (100). We present surface covering process electroless deposition. The reconstruction in this case takes place room temperature. state position was also investigated; TEM measurements indicate NaWO 3 is film. STM images Ag(W) growth show a spiral feature may reveal dominant electrochemical driving force during growth. presence well-resolved steps its nature were demonstrated by fast immersion chronovoltametry. This method applied follow changes energy, which caused pretreatment processes itself.
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ecsdl.org参考文章(14)
A. Natori, M. Murayama, H. Yasunaga, Atomic structures of Ag on and on 7 × 7 Si(111) Surface Science. ,vol. 357-358, pp. 47- 50 ,(1996) , 10.1016/0039-6028(96)00055-6
Yosi Shacham-Diamand, Alexandra Inberg, Yelena Sverdlov, Nathan Croitoru, Electroless Silver and Silver with Tungsten Thin Films for Microelectronics and Microelectromechanical System Applications Journal of The Electrochemical Society. ,vol. 147, pp. 3345- 3349 ,(2000) , 10.1149/1.1393904
N Radić, A Tonejc, M Milun, P Pervan, J Ivkov, M Stubičar, Preparation and structure of AlW thin films Thin Solid Films. ,vol. 317, pp. 96- 99 ,(1998) , 10.1016/S0040-6090(97)00508-7
M. Watamori, T. Nakahara, K. Oura, F. Shoji, T. Hanawa, Structural change of Si(100) and (111) surfaces after Ag deposition studied by MeV ion channeling Applied Surface Science. pp. 51- 57 ,(1988) , 10.1016/0169-4332(88)90287-5
X. F. Lin, K. J. Wan, J. Nogami, Surface reconstructions in the Ag/Si(001) system Physical Review B. ,vol. 49, pp. 7385- 7393 ,(1994) , 10.1103/PHYSREVB.49.7385
D. E. Bürgler, C. M. Schmidt, D. M. Schaller, F. Meisinger, T. M. Schaub, A. Baratoff, H.-J. Güntherodt, ATOMIC-SCALE SCANNING TUNNELING MICROSCOPY OF AMORPHOUS SURFACES Physical Review B. ,vol. 59, pp. 10895- 10902 ,(1999) , 10.1103/PHYSREVB.59.10895
Yasuyuki Ohba, Itsuo Katayama, Yasuji Yamamoto, Michio Watamori, Kenjiro Oura, Reconstruction and growth of Ag on hydrogen-terminated Si(111) surfaces Applied Surface Science. ,vol. 113114, pp. 448- 452 ,(1997) , 10.1016/S0169-4332(96)00900-2
X. F. Lin, K. J. Wan, J. Nogami, Ag on the Si(001) surface: Growth of the first monolayer at room temperature. Physical Review B. ,vol. 47, pp. 13491- 13497 ,(1993) , 10.1103/PHYSREVB.47.13491
Terada Yasushi, Yoshizuka Tohru, Oura Kenjiro, Hanawa Teruo, A structure analysis of Ag-adsorbed Si(111) surface by LEED/CMTA Surface Science Letters. ,vol. 114, pp. 65- 84 ,(1982) , 10.1016/0039-6028(82)90456-3
K. Nishimori, H. Tokutaka, T. Tamon, S. Kishida, N. Ishihara, A RHEED study of the initial growth of Ag on the Si(001) surface Surface Science. ,vol. 242, pp. 157- 161 ,(1991) , 10.1016/0039-6028(91)90259-U