Method of forming a contact window

摘要: The present invention discloses a method of forming contact window on substrate. in the includes step gate structure said substrate having oxide, electrode and protection layer electrode, conforming with structure, first insulation over layer. further removing portion for side wall spacers at walls performing ion implantation to using as mask, then second substrate, spacers, structure. patterning photoresist expose making connection. Finally, is removed window.