Single electron transistors with Nb/AlOx/Nb junctions
作者： R. Dolata , H. Scherer , A. B. Zorin , J. Niemeyer
DOI: 10.1116/1.1560213
关键词:
摘要: Deep submicron Nb/AlOx/Nb tunnel junctions and single electron transistors were fabricated by beam gun shadow evaporation, using stencil masks consisting of the thermostable polymer polyethersulfone germanium. The I(U) characteristics show special features due to tunneling Cooper pairs quasiparticles. Significant e-periodic gate modulation is observed in both superconducting normal state a gap energy Δeff up ≈1 meV has been achieved. refractory metal Nb combination with evaporation technique are discussed.
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A. B. Pavolotsky, Th. Weimann, H. Scherer, V. A. Krupenin, J. Niemeyer, A. B. Zorin, Multilayer technique for fabricating Nb junction circuits exhibiting charging effects Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 17, pp. 230- 232 ,(1999) , 10.1116/1.590504
Jukka Pekola, Jussi Toppari, Klavs Hansen, Nam Kim, Tarmo Suppula, Fabrication of mesoscopic superconducting Nb wires using conventional electron-beam lithographic techniques Journal of Vacuum Science & Technology B. ,vol. 20, pp. 386- 388 ,(2002) , 10.1116/1.1445168
K. K. Likharev, A. B. Zorin, Theory of the Bloch-wave oscillations in small Josephson junctions Journal of Low Temperature Physics. ,vol. 59, pp. 347- 382 ,(1985) , 10.1007/BF00683782
G.J. Dolan, J.H. Dunsmuir, Very small (⪸ 20 nm) lithographic wires, dots, rings, and tunnel junctions Physica B-condensed Matter. ,vol. 152, pp. 7- 13 ,(1988) , 10.1016/0921-4526(88)90060-9
M. T. Tuominen, J. M. Hergenrother, T. S. Tighe, M. Tinkham, Experimental evidence for parity-based 2eperiodicity in a superconducting single-electron tunneling transistor Physical Review Letters. ,vol. 69, pp. 1997- 2000 ,(1992) , 10.1103/PHYSREVLETT.69.1997
T. A. Fulton, P. L. Gammel, D. J. Bishop, L. N. Dunkleberger, G. J. Dolan, Observation of combined Josephson and charging effects in small tunnel junction circuits Physical Review Letters. ,vol. 63, pp. 1307- 1310 ,(1989) , 10.1103/PHYSREVLETT.63.1307
Alec Maassen van den Brink, Gerd Schön, L. J. Geerligs, Combined single-electron and coherent-Cooper-pair tunneling in voltage-biased Josephson junctions. Physical Review Letters. ,vol. 67, pp. 3030- 3033 ,(1991) , 10.1103/PHYSREVLETT.67.3030
F. Müller, H. Schulze, R. Behr, J. Kohlmann, J. Niemeyer, The Nb–Al technology at PTB – a common base for different types of Josephson voltage standards Physica C-superconductivity and Its Applications. ,vol. 354, pp. 66- 70 ,(2001) , 10.1016/S0921-4534(01)00037-5
H. S. J. van der Zant, H. A. Rijken, J. E. Mooij, The superconducting transition of 2-D Josephson-junction arrays in a small perpendicular magnetic field Journal of Low Temperature Physics. ,vol. 79, pp. 289- 310 ,(1990) , 10.1007/BF00682288
John M. Martinis, R. H. Ono, Fabrication of ultrasmall Nb‐AlOx‐Nb Josephson tunnel junctions Applied Physics Letters. ,vol. 57, pp. 629- 631 ,(1990) , 10.1063/1.103618