Methods Of Manufacturing Stair-Type Structures And Methods Of Manufacturing Nonvolatile Memory Devices Using The Same

摘要: Methods of manufacturing stair-type structures and methods nonvolatile memory devices using the same. may include forming a plurality thin layers stacked in plate shapes, mask on an utmost layer, patterning layer as etch mask, escalating width etching each at different to form structure layers. Control gates be formed into structures.