Semiconductor memory device and production method thereof

作者: Megumi Ishiduki , Murato Kawai , Toru Matsuda , Tadashi Iguchi , Hisashi Kato

DOI:

关键词: Memory cellTransistorProduction (computer science)Semiconductor memoryEngineeringString (computer science)Electrical engineeringElectrical conductor

摘要: A semiconductor memory device according to an embodiment includes a cell array configured have string obtained by connecting first selection transistors, and second transistors in series. When three directions crossing each other are set first, second, third directions, respectively, the has conductive layers be control gates of which laminated direction. Ends ends formed shapes steps extending direction both