Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry
作者： T Czerwiec , F Greer , D B Graves
DOI: 10.1088/0022-3727/38/24/003
关键词:
摘要: A cylindrical inductively coupled plasma source (ICPS) is optimized for nitrogen atom production. How to operate in the bright mode (H-mode) pure at relatively low applied power explained. Actinometry developed a quantitative determination of dissociation fraction ICPS. These results are compared with those obtained outside ICPS by modulated beam mass spectrometry. qualitative agreement between dissociative inside and The higher magnitude given spectrometry that derived from actinometry explained contribution recombination near exit hole up 0.7 observed Some also reported argon–nitrogen gas mixtures.
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J C Thomaz, J Amorim, C F Souza, Validity of actinometry to measure N and H atom concentration in N2-H2 direct current glow discharges Journal of Physics D. ,vol. 32, pp. 3208- 3214 ,(1999) , 10.1088/0022-3727/32/24/317
J. Musielok, W. L. Wiese, G. Veres, Atomic transition probabilities and tests of the spectroscopic coupling scheme for N I. Physical Review A. ,vol. 51, pp. 3588- 3597 ,(1995) , 10.1103/PHYSREVA.51.3588
J. Henriques, E. Tatarova, F. M. Dias, C. M. Ferreira, Wave driven N2–Ar discharge. II. Experiment and comparison with theory Journal of Applied Physics. ,vol. 91, pp. 5632- 5639 ,(2002) , 10.1063/1.1462843
G. J. Bengtsson, J. Larsson, S. Svanberg, D. D. Wang, Natural Lifetimes of Excited-states of Neutral Nitrogen Determined By Time-resolved Laser Spectroscopy Physical Review A. ,vol. 45, pp. 2712- 2715 ,(1992) , 10.1103/PHYSREVA.45.2712
M. V. Malyshev, V. M. Donnelly, Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 15, pp. 550- 558 ,(1997) , 10.1116/1.580682
A Ricard, JE Oseguera-Pena, L Falk, H Michel, M Gantois, None, Active species in microwave postdischarge for steel-surface nitriding IEEE Transactions on Plasma Science. ,vol. 18, pp. 940- 944 ,(1990) , 10.1109/27.61507
A.J. Ptak, K.S. Ziemer, M.R. Millecchia, C.D. Stinespring, T.H. Myers, Influence of Active Nitrogen Species on the Nitridation Rate of Sapphire Mrs Internet Journal of Nitride Semiconductor Research. ,vol. 4, pp. 161- 166 ,(1999) , 10.1557/S1092578300002398
K.A. MacKinnon, LXVI. On the origin of the electrodeless discharge Philosophical Magazine Series 1. ,vol. 8, pp. 605- 616 ,(1929) , 10.1080/14786441108564921
N. Sadeghi, D. W. Setser, A. Francis, U. Czarnetzki, H. F. Döbele, Quenching rate constants for reactions of Ar(4p′[1/2]0, 4p[1/2]0, 4p[3/2]2, and 4p[5/2]2) atoms with 22 reagent gases Journal of Chemical Physics. ,vol. 115, pp. 3144- 3154 ,(2001) , 10.1063/1.1388037
W. A. Runciman, R. W. G. Syme, The optical absorption of divalent chromium in CrCl2. 4H2O and CrSO4. 7H2O Philosophical Magazine. ,vol. 8, pp. 605- 613 ,(1963) , 10.1080/14786436308211159