Effect of R.F Power to the Properties of ZnO Thin Films Deposited by Magnetron Sputtering
作者： Nor Diyana Md Sin , M.Z. Musa , Mohamad Rusop
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMR.364.119
关键词:
摘要: … Highly oriented ZnO thin films [002] direction was obtained by using Rigaku Ultima IV. The … It have numerous function in semiconductor material such potential for catalyst, conduction …
sci-hub.se 参考文章(9)
N Ekem, S Korkmaz, S Pat, MZ Balbag, EN Cetin, M Ozmumcu, None, Some physical properties of ZnO thin films prepared by RF sputtering technique International Journal of Hydrogen Energy. ,vol. 34, pp. 5218- 5222 ,(2009) , 10.1016/J.IJHYDENE.2009.02.001
Gang Xiong, John Wilkinson, Brian Mischuck, S. Tüzemen, K. B. Ucer, R. T. Williams, Control of p- and n-type conductivity in sputter deposition of undoped ZnO Applied Physics Letters. ,vol. 80, pp. 1195- 1197 ,(2002) , 10.1063/1.1449528
Georgi P. Daniel, V.B. Justinvictor, Prabitha B. Nair, K. Joy, Peter Koshy, P.V. Thomas, EFFECT OF ANNEALING TEMPERATURE ON THE STRUCTURAL AND OPTICAL PROPERTIES OF ZNO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING Physica B-condensed Matter. ,vol. 405, pp. 1782- 1786 ,(2010) , 10.1016/J.PHYSB.2010.01.039
Su-Shia Lin, Jow-Lay Huang, Effect of thickness on the structural and optical properties of ZnO films by r.f. magnetron sputtering Surface & Coatings Technology. ,vol. 185, pp. 222- 227 ,(2004) , 10.1016/J.SURFCOAT.2003.11.014
Wang Guanghua, Kong Jincheng, Li Xiongjun, Qiu Feng, Li Cong, Yang Lili, Kong Lingde, Ji Rongbin, Effect of power variation on microstructure and surface morphology of HgCdTe films deposited by RF magnetron sputtering Journal of Semiconductors. ,vol. 31, pp. 053004- ,(2010) , 10.1088/1674-4926/31/5/053004
SAC Carabineiro, BF Machado, RR Bacsa, P Serp, G Dražić, JL Faria, JL Figueiredo, None, Catalytic performance of Au/ZnO nanocatalysts for CO oxidation Journal of Catalysis. ,vol. 273, pp. 191- 198 ,(2010) , 10.1016/J.JCAT.2010.05.011
Y.M. Lu, W.S. Hwang, W.Y. Liu, J.S. Yang, Effect of RF power on optical and electrical properties of ZnO thin film by magnetron sputtering Materials Chemistry and Physics. ,vol. 72, pp. 269- 272 ,(2001) , 10.1016/S0254-0584(01)00450-3
Gareth M. Fuge, Tobias M.S. Holmes, Michael N.R. Ashfold, Ultrathin aligned ZnO nanorod arrays grown by a novel diffusive pulsed laser deposition method Chemical Physics Letters. ,vol. 479, pp. 125- 127 ,(2009) , 10.1016/J.CPLETT.2009.08.008
Zhan-Yun Huang, Min Chen, Shi-Rong Pan, Di-Hu Chen, Effect of surface microstructure and wettability on plasma protein adsorption to ZnO thin films prepared at different RF powers Biomedical Materials. ,vol. 5, pp. 054116- ,(2010) , 10.1088/1748-6041/5/5/054116