FAST SEARCH ALGORITHMS FOR INDUSTRIAL INSPECTION
作者： MING-CHING CHANG , CHIOU-SHANN FUH , HSIEN-YEI CHEN
DOI: 10.1142/S0218001401001039
关键词:
摘要: This paper presents an efficient general purpose search algorithm for alignment and applied procedure IC print mark quality inspection. The is based on normalized cross-correlation enhances it with a hierarchical resolution pyramid, dynamic programming, pixel over-sampling to achieve subpixel accuracy one or more targets. robust respect linear change of image intensity thus can be industrial visual Accuracy, speed, reliability, repeatability are all critical the use. After proper optimization, proposed was tested inspection platforms in Mechanical Industry Research Laboratories (MIRL), Industrial Technology Institute (ITRI), Taiwan. method meets these criteria has worked well field tests various products.
ntu.edu.tw
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