Micro-Electro-Mechanical Transducer Having a Surface Plate
作者： Yongli Huang
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摘要: A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The has base, spring layer placed over the and mass connected to through spring-mass connector. base includes first electrode. or second form gap therebetween are anchor. provides substantially independent contribution model without affecting equivalent constant. also functions surface plate interfacing with medium improve transducing performance. Fabrication methods make same
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