作者: Heinz Loreck , Keith L. Kraver , Mark E. Schlarmann , Deyou Fang , Mike A. Margules
DOI:
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摘要: Systems and methods are provided for monitoring operation of MEMS accelerometers ( 100 ). In these embodiments a control loop 112 ) having forward path 114 is coupled transducer 110 ), test signal generator 124 detector 126 provided. The configured to generate apply the during accelerometer receive an output from detect effects in signal. Finally, further monitor indicative sensing device provide continuous