Mcu-based compensation and calibration for mems devices
作者： Raimondo P. Sessego , Bruno Debeurre , Tehmoor M. Dar
DOI:
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摘要: A sensor system includes a microelectromechanical systems (MEMS) sensor, processor, measurement circuitry, stimulus circuitry and memory. The MEMS is configured to provide an output responsive physical displacement within the circuitry. signal cause sensor. process from it processor. processor generate signals them for provision monitor corresponding occurring in calculate characteristics based on output, update calibration values output. Methods monitoring calibrating sensors are also provided.
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