Formation of Copper oxide thin films from RF sputtered Cu thin film by ultra high pure boiled water
作者： Subramani Shanmugan , Devarajan Mutharasu
DOI: 10.1109/SMELEC.2012.6417108
关键词:
摘要: Copper oxide thin films were synthesized from rf sputtered Cu film using ultra high pure hot water. X ray diffraction studies confirmed the formation of mixed phases (Cubic 2 O and Monolithic CuO) after processing for 3 hrs duration. Transmittance also revealed conversion into by showing transmittance processed film. The calculated band gap (2.6–2.69 eV) is higher than bulk copper oxides (2.14 eV). PL spectra showed three dominant peaks at 390nm, 522nm 680 nm related to nano structured O. Raman crystals oxides.
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