Atmospheric pressure plasma jet device of integrated mask plate

作者: Yang Chunsheng , Chen Xiang , Liu Jingquan , Yang Bin , Wang Tao

DOI:

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摘要: The invention provides an atmospheric pressure plasma jet device of integrated mask plate. comprises a bottom sleeve, plate, high voltage electrode and power supply. plate is arranged in the three positioning bosses are sleeve so as to realize fastening positioning. connected through screw thread. inserted into insertion hole terminal low A working gas enters air inlet on sleeve. supply electrified. After being ionized, emitted via generate stable graphical with graph which same usage method simple, complex photoetching technology not needed required can be directly generated rapid processing material.

参考文章(8)
Danny Havermans, Jan Jozef Cools, Robby Jozef Martin Rego, Atmospheric-pressure plasma jet ,(2006)
Hou Shiying, Luo Shuhao, Zhang Wenyu, Zeng Peng, Huang Zhe, Sun Tao, Novel needle-ring type plasma jet device ,(2013)
Xin Yu, Yu Yiqing, Tang Chengshuang, Shen Ming, Li Hao, Wang Zhe, Plasma jet device and subassembly ,(2016)
Lee Jae Ok, Hur Min, Kim Kwan Tae, Kang Woo Seok, Lee Dae Hoon, Song Young Hoon, ATMOSPHERIC-PRESSURE PLASMA REACTOR FOR LARGE AREA TREATMENT ,(2012)
Deguchi Shinji, Sato Masaaki, Matsui Tsubasa, PATTERNING DEVICE AND PATTERNING METHOD ,(2013)
Guo Honglei, Tang Longjun, Chen Xiang, Wang Zhaoyu, Yang Chunsheng, Yang Bin, Du Jingcheng, Liu Jingquan, Barometric pressure air micro-plasma jet device for etching thin polymer film without mask ,(2014)
Zhang Guangqiu, Ge Yuanjing, Zhang Yaofei, Medium in atmospheric pressure blocking off discharging plasma gun ,(2003)