Micro-displacement reconstruction using a laser self-mixing grating interferometer with multiple-diffraction.

摘要: In this paper, we demonstrated an improved laser self-mixing grating interferometer (SMGI) with auto-collimation design which can avoid the disturbance from light feedback of zero-order diffraction beam. order to obtain higher optical subdivision, SMGI multiple-diffraction is implemented. Both theoretical analysis and experimental work show that proposed system for displacement measurement achieve high sensitivity low uncertainty. Using system, different forms micro-displacement signals applied on target (grating) have been reconstructed accuracy a few nanometers. The presented in paper provides good way robust precision compact configuration.