Layer uniformity of glancing angle deposition
作者： Jianguo Wang , Jianda Shao , Kui Yi , Zhengxiu Fan
DOI: 10.1016/J.VACUUM.2004.12.019
关键词:
摘要: Some results of an investigation on the layer thickness uniformity glancing angle deposition are presented. A zirconia monolayer has been deposited by to analyze uniformity. The experimental indicate that variation over substrate is less than 0.1%, which considered as good It found non-uniformity larger theoretical results.
harvard.edu
elsevier.com
core.ac.uk 
sci-hub.se 参考文章(10)
I. Hodgkinson, Q. h. Wu, Inorganic Chiral Optical Materials Advanced Materials. ,vol. 13, pp. 889- 897 ,(2001) , 10.1002/1521-4095(200107)13:12/13<889::AID-ADMA889>3.0.CO;2-K
K. Robbie, M. J. Brett, Sculptured thin films and glancing angle deposition: Growth mechanics and applications Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 15, pp. 1460- 1465 ,(1997) , 10.1116/1.580562
Kate Kaminska, Kevin Robbie, Birefringent omnidirectional reflector. Applied Optics. ,vol. 43, pp. 1570- 1576 ,(2004) , 10.1364/AO.43.001570
Ian Hodgkinson, Qi Hong Wu, Birefringent thin-film polarizers for use at normal incidence and with planar technologies Applied Physics Letters. ,vol. 74, pp. 1794- 1796 ,(1999) , 10.1063/1.123088
T Seino, Y Kawakubo, K Nakajima, M Kamei, Uniformity improvement in dc magnetron sputtering deposition on a large area substrate Vacuum. ,vol. 51, pp. 791- 793 ,(1998) , 10.1016/S0042-207X(98)00292-9
L. Holland, W. Steckelmacher, The distribution of thin films condensed on surfaces by the vacuum evaporation method Vacuum. ,vol. 2, pp. 346- 364 ,(1952) , 10.1016/0042-207X(52)93784-6
K Robbie, JC Sit, MJ Brett, Advanced techniques for glancing angle deposition Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 16, pp. 1115- 1122 ,(1998) , 10.1116/1.590019
M. Shishkov, D. Popov, Thickness uniformity of thin films deposited on a flat substrate by sputtering of a target with rotational symmetry Vacuum. ,vol. 42, pp. 1005- 1008 ,(1991) , 10.1016/0042-207X(91)90008-7
S Todorova, D Popov, E Dimitrov, D Dochev, M Kanev, Thickness uniformity of vacuum deposited layers Vacuum. ,vol. 38, pp. 869- 872 ,(1988) , 10.1016/0042-207X(88)90482-4
H. A. Macleod, Thin-film optical filters ,(1969)