摘要: Following the graphene isolation, strong interest in two dimensional (2D) materials has been driven by their outstanding properties. Their typical intrinsic structure, including strong in …
harvard.edu
sci-hub.se 
hal.science 参考文章(228)
Steven Consiglio, Robert D. Clark, David O'Meara, Cory S. Wajda, Kandabara Tapily, Gert J. Leusink, Comparison of B2O3 and BN deposited by atomic layer deposition for forming ultrashallow dopant regions by solid state diffusion Journal of Vacuum Science and Technology. ,vol. 34, ,(2016) , 10.1116/1.4928705
Jeffry Kelber, Controlled epitaxial boron nitride growth for graphene based transistors ,(2013)
Martijn F. J. Vos, Bart Macco, Nick F. W. Thissen, Ageeth A. Bol, W. M. M. (Erwin) Kessels, Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma Journal of Vacuum Science and Technology. ,vol. 34, ,(2016) , 10.1116/1.4930161
Annelies Delabie, Matty Caymax, Benjamin Groven, Markus H. Heyne, Karel Haesevoets, Johan Meersschaut, Thomas Nuytten, Hugo Bender, Patrick Conard, Thierry, Verdonck, Sven Van Elshocht, Stefan De Gendt, Marc M. Heyns, Kathy Barla, Iuliana P. Radu, Aaron Thean, Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents Chemical Communications. ,vol. 51, pp. 15692- 15695 ,(2015) , 10.1039/C5CC05272F
B. Macco, M. F. J. Vos, N. F. W. Thissen, A. A. Bol, W. M. M. Kessels, Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells Physica Status Solidi-rapid Research Letters. ,vol. 9, pp. 393- 396 ,(2015) , 10.1002/PSSR.201510117
P. Tägtström, P. Maårtensson, U. Jansson, J.‐O. Carlsson, Atomic Layer Epitaxy of Tungsten Oxide Films Using Oxyfluorides as Metal Precursors Journal of The Electrochemical Society. ,vol. 146, pp. 3139- 3143 ,(1999) , 10.1149/1.1392445
Matteo Bosi, Growth and synthesis of mono and few-layers transition metal dichalcogenides by vapour techniques: a review RSC Advances. ,vol. 5, pp. 75500- 75518 ,(2015) , 10.1039/C5RA09356B
Seba Varghese, Saino Varghese, Sundaram Swaminathan, Krishna Singh, Vikas Mittal, Two-Dimensional Materials for Sensing: Graphene and Beyond Electronics. ,vol. 4, pp. 651- 687 ,(2015) , 10.3390/ELECTRONICS4030651
M. A. Mamun, K. Zhang, H. Baumgart, A. A. Elmustafa, Nanomechanical and Morphological Characterization of Tungsten Trioxide (WO3) Thin Films Grown by Atomic Layer Deposition ECS Journal of Solid State Science and Technology. ,vol. 4, pp. 398- ,(2015) , 10.1149/2.0241509JSS
Pablo Jarillo-Herrero, Max C. Lemme, Britton W. H. Baugher, David C. Bell, James R. Williams, Lewis A. Stern, Charles Masamed Marcus, Etching of graphene devices with a helium ion beam. ACS Nano. ,vol. 3, pp. 2674- 2676 ,(2009) , 10.1021/NN900744Z