High-performance metal oxide nanowire chemical sensors with integrated micromachined hotplates
作者： Koungmin Ryu , Daihua Zhang , Chongwu Zhou
DOI: 10.1063/1.2841665
关键词:
摘要: … nanowire chemical sensors with micromachined hotplates built on SiN membranes. These hotplates allowed nanowire chemical sensors … integration of nanowire chemical sensors with …
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