Rhenium silicide thin films: structural analysis of the ReSi/sub 2-/spl delta//-phase
作者： W. Pitschke , A. Heinrich , J. Schumann
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摘要: The structure of the semiconducting ReSi/sub 2-/spl delta// phase formed in binary rhenium silicide thin films has been studied using X-ray powder diffraction. were deposited by magnetron cosputtering onto unheated, oxidized Si-wafers. Subsequent annealing results crystallization amorphous films. By means Rietveld analysis unit cell dimensions and atomic occupation factors crystalline phases have determined. After film at T=973 K a delta//-phase was chemical composition which determined to be 1.55/. Temperature enhancement gave rise increase Si resulting an 1.78/ T=1073 K. This crystallizes with primitive space group P1 a=0.3138 nm, b=0.3118 c=0.7688 nm /spl alpha/=89.83.
sci-hub.se 参考文章(11)
Shyam P Murarka, Silicides for VLSI applications Elsevier. ,(1983)
R. A. Young, The Rietveld method Crystal Research and Technology. ,vol. 30, ,(1993)
W. Pitschke, Application of the Rietveld Method to XRD Patterns of Thin Films Recorded in Parallel Beam Geometry Materials Science Forum. pp. 171- 176 ,(1996) , 10.4028/WWW.SCIENTIFIC.NET/MSF.228-231.171
T Siegrist, F Hulliger, G Travaglini, The crystal structure and some properties of ReSi2 Journal of The Less Common Metals. ,vol. 92, pp. 119- 129 ,(1983) , 10.1016/0022-5088(83)90233-3
H. M. Rietveld, A profile refinement method for nuclear and magnetic structures Journal of Applied Crystallography. ,vol. 2, pp. 65- 71 ,(1969) , 10.1107/S0021889869006558
U. Gottlieb, B. Lambert‐Andron, F. Nava, M. Affronte, O. Laborde, A. Rouault, R. Madar, Structural and electronic transport properties of ReSi2−δ single crystals Journal of Applied Physics. ,vol. 78, pp. 3902- 3907 ,(1995) , 10.1063/1.360707
Bijan K. Bhattacharyya, D. M. Bylander, Leonard Kleinman, Fully relativistic energy bands and cohesive energy of ReSi2. Physical Review B. ,vol. 33, pp. 3947- 3951 ,(1986) , 10.1103/PHYSREVB.33.3947
R. J. Hill, C. J. Howard, Quantitative phase analysis from neutron powder diffraction data using the Rietveld method Journal of Applied Crystallography. ,vol. 20, pp. 467- 474 ,(1987) , 10.1107/S0021889887086199
J.L. Jorda, M. Ishikawa, J. Muller, Phase relations and superconductivity in the binary Re-Si system Journal of The Less Common Metals. ,vol. 85, pp. 27- 35 ,(1982) , 10.1016/0022-5088(82)90055-8
Satoshi Itoh, Electronic structures of refractory metal disilicides in C11b structure Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 6, pp. 37- 41 ,(1990) , 10.1016/0921-5107(90)90112-O