Argon metastables in HiPIMS : Validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnostics
作者： G D Stancu , N Brenning , C Vitelaru , D Lundin , T Minea
DOI: 10.1088/0963-0252/24/4/045011
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摘要: The volume plasma interactions of high power impulse magnetron sputtering (HiPIMS) discharges operated with a Ti target is analyzed in detail by combining time-resolved diagnostics modeling ...
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