Plasma diagnostics for understanding the plasma?surface interaction in HiPIMS discharges: a review
作者： Nikolay Britun , Tiberiu Minea , Stephanos Konstantinidis , Rony Snyders
DOI: 10.1088/0022-3727/47/22/224001
关键词: Sputtering 、 High-power impulse magnetron sputtering 、 Engineering physics 、 Sputter deposition 、 Cavity magnetron 、 Nanotechnology 、 Plasma 、 Materials science 、 Plasma diagnostics 、 Cathode 、 Plasma surface interaction
摘要: … of the plasma phase generated in HiPIMS discharges. This is … the modelling studies of a HiPIMS discharge, which are still … in the domain of HiPIMS discharge characterization, obtained …
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