Characterization of energetic and thermalized sputtered atoms in pulsed plasma using time-resolved tunable diode-laser induced fluorescence
作者： M. Desecures , L. de Poucques , T. Easwarakhanthan , J. Bougdira
DOI: 10.1063/1.4901440
关键词:
摘要: In this work, a time-resolved tunable diode-laser (DL) induced fluorescence (TR-TDLIF) method calibrated by absorption spectroscopy has been developed in order to determine atom and flux velocity distribution functions (AVDF FVDF) of the energetic thermalized atoms pulsed plasmas. The experimental set-up includes low-frequency (∼3 Hz) high spectral-resolution DL (∼0.005 pm), fast rise-time pulse generator, power impulse magnetron sputtering (HiPIMS) system. TR-TDLIF signal is recorded every 0.5 μs with digital oscilloscope second-long trace. technique illustrated determining AVDF FVDF metastable state sputtered neutral tungsten HiPIMS post-discharge. Gaussian describing population four W isotopes were used fit measured signal. These provide insight into transition from regimes discharge onset. This may be extended appropriate DLs probe any species rapidly changing strongly oscillating
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sci-hub.se 参考文章(25)
M STEPANOVA, S DEW, Anisotropic energies of sputtered atoms under oblique ion incidence Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 215, pp. 357- 365 ,(2004) , 10.1016/J.NIMB.2003.09.013
R. E. Somekh, The thermalization of energetic atoms during the sputtering process Journal of Vacuum Science and Technology. ,vol. 2, pp. 1285- 1291 ,(1984) , 10.1116/1.572396
C. J. Durot, A. D. Gallimore, T. B. Smith, Validation and evaluation of a novel time-resolved laser-induced fluorescence technique Review of Scientific Instruments. ,vol. 85, pp. 013508- ,(2014) , 10.1063/1.4856635
C. Vitelaru, L. de Poucques, T. M. Minea, G. Popa, Time resolved metal line profile by near-ultraviolet tunable diode laser absorption spectroscopy Journal of Applied Physics. ,vol. 109, pp. 053307- ,(2011) , 10.1063/1.3553395
Nikolay Britun, Tiberiu Minea, Stephanos Konstantinidis, Rony Snyders, Plasma diagnostics for understanding the plasma?surface interaction in HiPIMS discharges: a review Journal of Physics D. ,vol. 47, pp. 224001- ,(2014) , 10.1088/0022-3727/47/22/224001
Maria Palmucci, Nikolay Britun, Stephanos Konstantinidis, Rony Snyders, Rarefaction windows in a high-power impulse magnetron sputtering plasma Journal of Applied Physics. ,vol. 114, pp. 113302- ,(2013) , 10.1063/1.4821514
C Vitelaru, L de Poucques, T M Minea, G Popa, Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge Plasma Sources Science and Technology. ,vol. 20, pp. 045020- ,(2011) , 10.1088/0963-0252/20/4/045020
N Britun, M Gaillard, J G Han, Laser induced fluorescence for Ti and Ti+ density characterization in a magnetron discharge Journal of Physics D. ,vol. 41, pp. 185201- ,(2008) , 10.1088/0022-3727/41/18/185201
C Vitelaru, C Aniculaesei, L de Poucques, T M Minea, C Boisse-Laporte, J Bretagne, G Popa, Tunable diode-laser induced fluorescence on Al and Ti atoms in low pressure magnetron discharges Journal of Physics D. ,vol. 43, pp. 124013- ,(2010) , 10.1088/0022-3727/43/12/124013
N. A. MacDonald, M. A. Cappelli, W. A. Hargus, Time-synchronized continuous wave laser-induced fluorescence on an oscillatory xenon discharge Review of Scientific Instruments. ,vol. 83, pp. 113506- ,(2012) , 10.1063/1.4766958