Laser induced fluorescence for Ti and Ti+ density characterization in a magnetron discharge
作者： N Britun , M Gaillard , J G Han
DOI: 10.1088/0022-3727/41/18/185201
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摘要: Laser induced fluorescence (LIF) was utilized for the determination of densities Ti atoms and ions (Ti+) in a dc magnetron discharge. The were measured under different discharge conditions, namely current, working pressure distance from target. total density species calculated using additional measurements broadening absorption lines both Ti+. width appears to be neutrals ions. To obtain absolute values by LIF, spectroscopy used. As result calibration LIF data optical value found ~2 × 1011 cm−3 near target at about 6 mTorr. Similar results obtained Ti+ with maximum ~3 109 cm−3.
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