Electrical Characteristics and Preparation of (Ba0.5Sr0.5)TiO3Films by Spray Pyrolysis and Rapid Thermal Annealing

摘要: Functional films of (Ba0.5Sr0.5)TiO3 on Pt (1000 A)/Ti (100 A)/SiO2 (2000 A)/Si substrates are prepared by spray pyrolysis and subsequently rapid thermal annealing. Barium nitrate, strontium nitrate titanium isopropoxide used as starting materials with ethylene glycol solvent. For functional thin film, characteristics the precursor powder scratched from as-sprayed show a remarkable peak around 300–400 °C 57.7% weight loss up to 1000 °C. The film coffee-like color amorphous-like phase is transformed into resultant white, crystalline perovskite characteristic peaks (110) (100). correspondent increases dielectric constant, leakage current dissipation factor increasing annealing temperatures. constant 264 tangent 0.21 in annealed at 750 for 5 min while density 1.5×10-6 A/cm2 550 min.