Microstructure and Dielectric Properties of Sputtered (Ba0.3Sr0.7)TiO3 Thin Films with Amorphous Interfacial Layers

摘要: Crystallization behavior, microstructure and dielectric properties of sputtered (Ba0.3Sr0.7)TiO3 thin films have been studied. The crystallization from as-deposited amorphous structure to equilibrium crystalline is confirmed as an irreversible, exothermic first-order transition by differential scanning calorimetry. At a heating rate 20°C/min, the peak temperature for measured be 697.3°C. Transmission electron microscopy results reveal layered structures perovskite phases in deposited at temperatures between 450 650°C. interfacial layer diminishes with increasing substrate well-crystallized film found 750°C loss 0.021. Dielectric constant shows abrupt increase 187 result fully crystallized structure. constants different are well consistent those calculated based on presence layers films.