Ba0.5Sr0.5TiO3 thin films deposited by PLD on SiO2/Si RuO2/Si and Pt/Si electrodes
作者： L.L López , J Portelles , J.M Siqueiros , G.A Hirata , J McKittrick
DOI: 10.1016/S0040-6090(00)01105-6
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摘要: Abstract Stoichiometric barium strontium titanate (Ba 0.5 Sr TiO 3 or BST) 220-nm thick thin films were deposited by pulsed laser ablation on SiO 2 /Si, RuO /Ta/SiO /Si and Pt/Ti/SiO substrates at 400°C. The weakly crystalline as-deposited. Crystallization was induced annealing the in range of 550–650°C. BST /c-Si presented wide cracks that promoted during process due to thermal expansion mismatch between (α =4×10 −6 °C −1 ) Pt =9×10 ). Smooth showing slightly cracked areas obtained substrates. ruthenium oxide coefficient is α =5.2×10 . A cross-sectional analysis ferroelectric/substrate interface showed for lower temperature (550°C) a mixed amorphous/nanocrystalline microstructure formed. For temperatures above 600°C randomly oriented polycrystalline material obtained. However, an amorphous layer 4–6 nm still remains substrate even after heat-treatments up 650°C. dielectric constant varied 30–325.
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sci-hub.se 参考文章(10)
Takanori Nakamura, Yasuhiro Yamanaka, Akiharu Morimoto, Tatsuo Shimizu, Effect of Oxygen Pressure on (BaxSr1-x)TiO3 Thin Films by Pulsed Laser Ablation Japanese Journal of Applied Physics. ,vol. 34, pp. 5150- 5153 ,(1995) , 10.1143/JJAP.34.5150
Hsiu‐Fung Cheng, Structural and optical properties of laser deposited ferroelectric (Sr0.2Ba0.8)TiO3 thin films Journal of Applied Physics. ,vol. 79, pp. 7965- 7971 ,(1996) , 10.1063/1.362346
D. Roy, S. B. Krupanidhi, Excimer laser ablated barium strontium titanate thin films for dynamic random access memory applications Applied Physics Letters. ,vol. 62, pp. 1056- 1058 ,(1992) , 10.1063/1.108793
Q. X. Jia, D. S. Zhou, X. D. Wu, S. R. Foltyn, P. Tiwari, T. E. Mitchell, Characterization of Ba0.5Sr0.5TiO3 thin film capacitors produced by pulsed laser deposition Integrated Ferroelectrics. ,vol. 10, pp. 73- 79 ,(1995) , 10.1080/10584589508012265
Shintaro Yamamichi, Hisato Yabuta, Toshiyuki Sakuma, Yoichi Miyasaka, (Ba+Sr)/Ti ratio dependence of the dielectric properties for (Ba0.5Sr0.5)TiO3 thin films prepared by ion beam sputtering Applied Physics Letters. ,vol. 64, pp. 1644- 1646 ,(1994) , 10.1063/1.111818
Takaaki Kawahara, Mikio Yamamuka, Akimasa Yuuki, Kouichi Ono, Surface morphologies and electrical properties of (ba, sr)tio3 films prepared by two-step deposition of liquid source chemical vapor deposition Japanese Journal of Applied Physics. ,vol. 34, pp. 5077- 5082 ,(1995) , 10.1143/JJAP.34.5077
J. Vetrone, C. M. Foster, G-R. Bai, A. Wang, J. Patel, X. Wu, GROWTH, MICROSTRUCTURE, AND RESISTIVITY OF RUO2 THIN FILMS GROWN BY METAL-ORGANIC CHEMICAL VAPOR DEPOSITION Journal of Materials Research. ,vol. 13, pp. 2281- 2290 ,(1998) , 10.1557/JMR.1998.0318
Yukio Fukuda, Hajime Haneda, Isao Sakaguchi, Ken Numata, Katsuhiro Aoki, Akitoshi Nishimura, Dielectric Properties of (Ba, Sr)TiO3 Thin Films and their Correlation with Oxygen Vacancy Density. Japanese Journal of Applied Physics. ,vol. 36, ,(1997) , 10.1143/JJAP.36.L1514
Robert Tsu, Hung-Yu Liu, Wei-Yung Hsu, Scott Summerfelt, Katsuhiro Aoki, Bruce Gnade, Correlations of Ba1−xSrxTiO3 Materials and Dielectric Properties MRS Proceedings. ,vol. 361, ,(1994) , 10.1557/PROC-361-275
Seshu B. Desu, Stresses in Ferroelectric Thin Films MRS Proceedings. ,vol. 200, ,(1990) , 10.1557/PROC-200-199