Growth and Characterization of Zinc Sulfide Thin Films Deposited by the Successive Ionic Layer Adsorption and Reaction (Silar) Method Using Complexed Zinc Ions As the Cation Precursor
作者： S Lindroos , Y Charreire , D Bonnin , M Leskelä
DOI: 10.1016/S0025-5408(97)00254-7
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摘要: Abstract Zinc sulfide thin films were grown by the successive ionic layer adsorption and reaction method on soda lime glass indium tin oxide covered glass, using diluted solutions of ZnCl 2 complexed with triethanolamine (TEA) or ethylenediamine as cation precursor a solution Na S anion precursor. The growth rate ZnS film varied between 0.13 0.27 nm/cycle. refractive indices from 1.95 to 2.23, packing densities 72 90%. highest found in TEA-complexed zinc chloride Zn:S ratio was 0.89 1.08. According X-ray diffraction study, polycrystalline presumably cubic. EXAFS studies revealed that crystallinity deposited similar Annealing slightly improved quality films.
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