Probe holding structure and optical inspection device equipped with the same
作者： Chiu-Kuei Chen , Chien-Chang Lai , Chia-Tai Chang , Yun-Ru Huang , Hui-Pin Yang
DOI:
关键词:
摘要: A probe holding structure includes a substrate and plurality of modules. The has an opening grooves arranged around periphery the opening. modules are connected with grooves, respectively. Each fixing member probes. is corresponding groove. probes pass through combined lens adjusting mechanism having to form optical inspection device for testing electric characteristics chips.
google.co.uk 参考文章(30)
Luciano P. DosSantos, Robin Ruck, Matthew J. Costello, John Brown, Probe station adapter for backside emission inspection ,(1997)
January Kister, Method and apparatus for aligning probes ,(1996)
Ewan Findlay, Sara Pellegrini, Sensor array microchip ,(2011)
Stojan Kanev, Claus Dietrich, Dietmar Runge, Probe holder for a probe for testing semiconductor components ,(2007)
January Kister, Low profile probe having improved mechanical scrub and reduced contact inductance ,(2010)
Paul A. Tervo, Warren K. Harwood, Martin J. Koxxy, Probe station with integrated environment control enclosure ,(1993)
Shingo F Yokohama-kanazawa Tamai, Instrument for testing solid-state imaging device ,(2003)
Shigemi Osawa, Kazuma Komuro, Optical device inspecting apparatus ,(2007)
January Kister, Vertical probe array arranged to provide space transformation ,(2009)
Eric Strid, K. Reed Gleason, Active wafer probe ,(2004)