Optical emission spectroscopy of rf discharge in SF6
作者： S. B. Radovanov , B. Tomčik , Z. Lj. Petrović , B. M. Jelenković
DOI: 10.1063/1.345211
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摘要: In this paper we present experimental results obtained for a rf discharge in SF6 and with Ar and/or N2. The data power dependence of some emission lines usually used actinometry are acquired their applicability excitation kinetics discussed. We also the spatial (time averaged) variations lines. From such high‐energy tail electron energy distribution function may be obtained.
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