An interrogation of the zinc oxide–gallium oxide phase space by plasma enhanced chemical vapor deposition

作者: J.J. Robbins , C. Fry , C.A. Wolden

DOI: 10.1016/J.JCRYSGRO.2003.10.093

关键词:

摘要: … It was shown to be quite complex, typified by the example that decreasing the … for zinc gallate synthesis. The films from 0.6 to 0.8 TMG fractions may contain a mixture of zinc gallate and …

参考文章(34)
Hiroki Naito, Shinobu Fujihara, Toshio Kimura, Blue Emission of ZnGa2O4 Nanoparticles Dispersed in Fluoride Thin Films via Sol-Gel Process Journal of Sol-Gel Science and Technology. ,vol. 26, pp. 997- 1000 ,(2003) , 10.1023/A:1020769631833
C. Jagadish, A. L. Dawar, A. K. Jain, Semiconducting Transparent Thin Films ,(1995)
Masahiro Orita, Hiromichi Ohta, Masahiro Hirano, Hideo Hosono, Deep-ultraviolet transparent conductive β-Ga2O3 thin films Applied Physics Letters. ,vol. 77, pp. 4166- 4168 ,(2000) , 10.1063/1.1330559
N. C. Oldham, C. J. Hill, C. M. Garland, T. C. McGill, Deposition of Ga2O3–x ultrathin films on GaAs by e-beam evaporation Journal of Vacuum Science and Technology. ,vol. 20, pp. 809- 813 ,(2002) , 10.1116/1.1469011
G.B Palmer, K.R Poeppelmeier, Phase relations, transparency and conductivity in Ga2O3-SnO2-ZnO Solid State Sciences. ,vol. 4, pp. 317- 322 ,(2002) , 10.1016/S1293-2558(01)01258-4
Yong Eui Lee, David P. Norton, Chan Park, Christopher M. Rouleau, Blue photoluminescence in ZnGa2O4 thin-film phosphors Journal of Applied Physics. ,vol. 89, pp. 1653- 1656 ,(2001) , 10.1063/1.1287228
Yong Eui Lee, David P. Norton, John D. Budai, Yayi Wei, Enhanced ultraviolet photoconductivity in semiconducting ZnGa2O4 thin films Journal of Applied Physics. ,vol. 90, pp. 3863- 3866 ,(2001) , 10.1063/1.1396829
Tadatsugu Minami, Yoshihiro Takeda, Shinzo Takata, Toshikazu Kakumu, Preparation of transparent conducting In4Sn3O12 thin films by DC magnetron sputtering Thin Solid Films. ,vol. 308, pp. 13- 18 ,(1997) , 10.1016/S0040-6090(97)00530-0
M. Rebien, W. Henrion, M. Hong, J. P. Mannaerts, M. Fleischer, Optical properties of gallium oxide thin films Applied Physics Letters. ,vol. 81, pp. 250- 252 ,(2002) , 10.1063/1.1491613
Tadatsugu Minami, Yoshihiro Kuroi, Shinzo Takata, Preparation of ZnGa2O4:Mn phosphor thin films as emitting layers for electroluminescent devices Journal of Vacuum Science and Technology. ,vol. 14, pp. 1736- 1740 ,(1996) , 10.1116/1.580329