Observation of the strain field near the Si(111) 7 × 7 surface with a new X‐ray diffraction technique
作者： Takashi Emoto , Koichi Akimoto , Ayahiko Ichimiya
DOI: 10.1107/S0909049597017792
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摘要: A new X-ray diffraction technique has been developed in order to measure the strain field near a solid surface under ultrahigh vacuum (UHV) conditions. The optics use an extremely asymmetric Bragg-case bulk reflection. glancing angle of X-rays can be set critical total reflection by tuning energy. Using this technique, rocking curves for Si surfaces with different structures, i.e. native oxide surface, slightly and Si(111) 7 × 7 surface, were measured. It was found that widths depend on structures. This is efficient distinguishing corresponding each structure.
sci-hub.se 参考文章(5)
T. Kitano, S Kimura, T. Ishikawa, Contrast formation mechanism for the surface defects imaged by x-ray topography under the condition of simultaneous specular and Bragg reflections Applied Physics Letters. ,vol. 60, pp. 177- 179 ,(1992) , 10.1063/1.107438
Eiji Hasegawa, Akihiko Ishitani, Koichi Akimoto, Masaru Tsukiji, Noriko Ohtac, SiO2 / Si Interface Structures and Reliability Characteristics Journal of The Electrochemical Society. ,vol. 142, pp. 273- 282 ,(1995) , 10.1149/1.2043901
Jun‐ichi Chikawa, Yuhko Asaeda, Isao Fujimoto, New X‐Ray Topographic Technique for Detection of Small Defects in Highly Perfect Crystals Journal of Applied Physics. ,vol. 41, pp. 1922- 1925 ,(1970) , 10.1063/1.1659142
P. C. Kelires, J. Tersoff, Equilibrium alloy properties by direct simulation: Oscillatory segregation at the Si-Ge(100) 2×1 surface Physical Review Letters. ,vol. 63, pp. 1164- 1167 ,(1989) , 10.1103/PHYSREVLETT.63.1164
Seigô Kishino, Kazutake Kohra, Theoretical Considerations on Bragg-case Diffraction of X-rays at a Small Glancing Angle Japanese Journal of Applied Physics. ,vol. 10, pp. 551- 557 ,(1971) , 10.1143/JJAP.10.551