Electron‐temperature control for plasmas passing through a negatively biased grid
作者： Kohgi Kato , Satoru Iizuka , Noriyoshi Sato
DOI: 10.1063/1.112240
关键词:
摘要: Electron‐temperature control is performed on plasmas passing through a coarse mesh grid from discharge region. By increasing negative potential applied to the grid, electron temperature continuously decreased in very wide range covering almost two orders of magnitude down value nearly equal background gas case direct current argon or helium discharge. The decrease accompanied by an increase density. This method electron‐temperature can also be produced radio‐frequency and cyclotron resonance discharges.
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sci-hub.se 参考文章(4)
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