Thin-film processing of TiNi shape memory alloy
作者： J.A. Walker , K.J. Gabriel , M. Mehregany
DOI: 10.1016/0924-4247(90)85047-8
关键词:
摘要: … venfy the shape recovery property of the thin-film Nltmol using reslstlve heatmg as the source of … for the release of the thin-film test structures that also has potential use m other thin-film …
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sci-hub.se 参考文章(14)
C. M. Jackson, H. J. Wagner, R. J. Wasilewski, The alloy with a memory, 55-Nitinol: Its physical metallurgy, properties, and applications ,(1972)
Yong-Kweon Kim, Makoto Katsurai, Hiroyuki Fujita, A superconducting actuator using the Meissner effect Sensors and Actuators. ,vol. 20, pp. 33- 40 ,(1989) , 10.1016/0250-6874(89)87099-4
Long-Shen Fan, Yu-Chong Tai, Richard S. Muller, IC-processed electrostatic micromotors Sensors and Actuators. ,vol. 20, pp. 41- 47 ,(1989) , 10.1016/0250-6874(89)87100-8
K.J. Gabriel, W.S.N. Trimmer, J.A. Walker, A micro rotary actuator using shape memory alloys Sensors and Actuators. ,vol. 15, pp. 95- 102 ,(1988) , 10.1016/0250-6874(88)85021-2
W.S.N. Trimmer, K.J. Gabriel, Design considerations for a practical electrostatic micro-motor Sensors and Actuators. ,vol. 11, pp. 189- 206 ,(1987) , 10.1016/0250-6874(87)80016-1
H.T.G. van Lintel, F.C.M. van De Pol, S. Bouwstra, A piezoelectric micropump based on micromachining of silicon Sensors and Actuators. ,vol. 15, pp. 153- 167 ,(1988) , 10.1016/0250-6874(88)87005-7
Katsutoshi Kuribayashi, A New Actuator of a Joint Mechanism Using TiNi Alloy Wire The International Journal of Robotics Research. ,vol. 4, pp. 47- 58 ,(1986) , 10.1177/027836498600400404
Dai HONMA, Yoshiyuki Miwa, Nobuhiro IGUCHI, APPLICATION OF SHAPE MEMORY EFFECT TO DIGITAL CONTROL ACTUATOR. Jsme International Journal Series B-fluids and Thermal Engineering. ,vol. 27, pp. 1737- 1742 ,(1984) , 10.1299/JSME1958.27.1737
H. Fujita, A. Omodaka, The fabrication of an electrostatic linear actuator by silicon micromachining IEEE Transactions on Electron Devices. ,vol. 35, pp. 731- 734 ,(1988) , 10.1109/16.2524
W. Benecke, W. Riethmuller, Applications of silicon microactuators based on bimorph structures international conference on micro electro mechanical systems. pp. 116- 120 ,(1989) , 10.1109/MEMSYS.1989.77974