Method to manufacture reduced mechanical stress electrodes and microcavity plasma device arrays

摘要: In a preferred method of formation embodiment, thin metal foil or film is obtained formed with microcavities (such as through holes). The anodized symmetrically so to form metal-oxide on the surface and walls microcavities. One more self-patterned electrodes are automatically simultaneously buried in oxide created by anodization process. closed circumference around each microcavity, for adjacent can be isolated connected. If microcavity cylindrical, rings cavity.