Arrays of microcavity plasma devices with dielectric encapsulated electrodes

摘要: The invention concerns microcavity plasma devices and arrays with thin foil metal electrodes protected by oxide dielectric. Devices of the are amenable to mass production techniques, may, for example, be fabricated roll processing. Exemplary flexible. Embodiments provide large that can made inexpensively. structure preferred embodiment is based upon foils available or produced in arbitrary lengths, such as on rolls. In a device invention, pattern microcavities foil. Oxide subsequently grown within (where produced) protect electrically isolate A second also encapsulated bonded first For no particular alignment necessary during bonding two foils. glass layer vacuum packaging, able seal discharge medium into array.