Driving system and driving method, exposure apparatus and exposure method, and driving system design method
作者： Koichi Sakata , Kazuaki Saiki , Hiroshi Fujimoto
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摘要: At a carriage that shows resonance mode in opposite phase to shown by plate table where an interferometer which measures position (a first controlled variable) of stage driven according control input is installed, another installed (the second the stage. By using and interferometer, it becomes possible design driving system robust high bandwidth drives
lens.org 参考文章(8)
Harry Sewell, Method and system for dual reticle image exposure ,(2002)
Hiroshi Shirasu, Kinya Kato, Masato Kumazawa, Masashi Tanaka, Hiroshi Chiba, Masaki Kato, Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus ,(2003)
Andrew Fleming, Positioning system and method ,(2009)
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, A method for damping an object, an active damping system, and a lithographic apparatus ,(2009)
Kazuaki Saiki, Tomohide Hamada, Stage device having drive mechanism for driving a movable stage, and exposure apparatus and method of detecting position of the stage ,(1999)
Kazuaki Saeki, 和明 佐伯, Stage device, stage control method, exposure device and method, and device manufacturing method ,(2005)
Suzuki Masami, DEVICE AND METHOD FOR PROCESSING DATA ,(2002)
Nonami Kenzo, Fujiwara Daigo, Miki Yuichiro, Hirata Mitsuo, Saeki Kazuaki, STAGE DEVICE, DESIGNING METHOD FOR STAGE CONTROLLER, AND EXPOSURE DEVICE ,(2002)