The end of the road for silicon

作者: Max Schulz

DOI: 10.1038/21526

关键词:

摘要: … Full circles indicate the silicon atoms in the silicon substrate and the polysilicon gate electrode. White circles indicate the silicon atoms in the oxide structure. In 2012 a gate …

参考文章(1)
D. A. Muller, T. Sorsch, S. Moccio, F. H. Baumann, K. Evans-Lutterodt, G. Timp, The electronic structure at the atomic scale of ultrathin gate oxides Nature. ,vol. 399, pp. 758- 761 ,(1999) , 10.1038/21602