Mems sensors with closed nodal anchors for operation in an in-plane contour mode
作者： Andrew W. Sparks , William D. Sawyer
DOI:
关键词:
摘要: A MEMS sensor includes at least one closed nodal anchor along a predetermined path on surface of resonant mass. The mass may be configured to resonate substantially in an in-plane contour mode. Drive and/or sense electrodes disposed within cavity formed part by the mass, anchor, and substrate.
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