Growth mode of Pt1−xNix films biased dc-sputter-deposited on MgO(0 0 1)

作者: Yoshimasa Amatatsu , Kenji Makihara , Ji Shi , Jiping Yang , Mituru Hashimoto

DOI: 10.1016/S0169-4332(00)00692-9

关键词:

摘要: Abstract A study is made by TEM, XRD and measuring electrical/magnetic properties, of growth mode properties Pt1−xNix alloy films deposited on MgO(0 0 1) at 250°C dc-sputtering 2.5–2.7 kV in Ar. bias voltage Vs≤−160 V was applied to the substrate during deposition. It confirmed that Pt film polycrystalline with texture Pt(1 1 1)/MgO(0 0 1) while Pt0.14Ni0.86 Pt0.19Ni0.81 were epitaxially grown Pt–Ni(0 0 1)[1 0 0]/MgO(0 0 1)[1 0 0] similarly case Ni/MgO(0 0 1). Thus transformation between Pt–Ni(1 1 1)/MgO(0 0 1) Pt–Ni(0 0 1)/MgO(0 0 1) may be induced x less than 0.81 for films. The temperature coefficient resistance TCR from 100 300 K estimated 0.0044–0.0053 K−1 saturation magnetization 1.7–3.2 kG, respectively, 0.0035–0.0048 K−1.

参考文章(8)
Tatsuya Ohbuchi, Masaki Ishino, Kenji Makihara, Hong Qiu, Mituru Hashimoto, Arpad Barna, Peter B. Barna, Structural and electrical properties of Ni-Co films dc-biased plasma-sputter-deposited on MgO(001) Thin Solid Films. ,vol. 312, pp. 32- 36 ,(1998) , 10.1016/S0040-6090(97)00274-5
Hong Qiu, Hisashi Nakai, Mituru Hashimoto, Gyorgy Safran, Miklos Adamik, Peter B. Barna, Eiichi Yagi, Epitaxial growth and characterization of Ni films grown on MgO(001) by biased direct-current sputter deposition Journal of Vacuum Science and Technology. ,vol. 12, pp. 2855- 2858 ,(1994) , 10.1116/1.578956
P.C. McIntyre, C.J. Maggiore, M. Nastasi, Epitaxy of Pt thin films on (001) MgO—I. Interface energetics and misfit accommodation Acta Materialia. ,vol. 45, pp. 869- 878 ,(1997) , 10.1016/S1359-6454(96)00182-6
H. Qiu, M. Hashimoto, A. Barna, P.B. Barna, Structural and electrical properties of NiCu films deposited onto MgO(001) by d.c. biased plasma sputter deposition Thin Solid Films. ,vol. 288, pp. 171- 175 ,(1996) , 10.1016/S0040-6090(96)08813-X
Hong Qiu, Gyorgy Sáfrán, Bela Pecz, Peter B. Barna, Akio Kosuge, Hisashi Nakai, Shigemi Yugo, Mituru Hashimoto, Structural and electrical properties of Ni films grown on Si(100) and SiO2 by d.c. bias sputtering Thin Solid Films. ,vol. 229, pp. 107- 112 ,(1993) , 10.1016/0040-6090(93)90416-M
Jialiang Zhang, Yoshimichi Nagao, Saburo Kuwano, Yoshinori Ito, Microstructure and Temperature Coefficient of Resistance of Platinum Films Japanese Journal of Applied Physics. ,vol. 36, pp. 834- 839 ,(1997) , 10.1143/JJAP.36.834
Hong Qiu, Tatsuya Ohbuchi, Hisashi Nakai, Mituru Hashimoto, Structural and physical properties of Co films DC-bias-plasma-sputter-deposited on MgO(001) Applied Surface Science. ,vol. 92, pp. 47- 51 ,(1996) , 10.1016/0169-4332(95)00200-6
Jiping Yang, Arpad Barna, Kenji Makihara, Mituru Hashimoto, Peter B. Barna, Growth structure and properties of Fe rich Fe-Ni alloy films deposited on MgO(001) by d.c.-biased plasma-sputtering Thin Solid Films. ,vol. 347, pp. 85- 90 ,(1999) , 10.1016/S0040-6090(98)01731-3